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用角分布XPS法研究了MOD法制得的YBCO膜在热处理过程中膜的表面元素浓度变化以及膜与村底ZrO_2之间的原子扩散和固态化学反应。结果表明无论是薄膜(约0.1μm)和较厚的膜(约1～1.5μm),在大约530～720℃的温度范围内加热后都发生铜表面富集和钡表面浓度偏低。在800℃以上加热后铜的表面浓度显著降低,温度愈高,降低愈甚。膜与衬底之间的化学反应也随温度升高而加剧。例如薄膜在890℃加热后钡向ZrO_2衬底扩散,膜中的铜仍以+2价为主;在950℃加热后衬底表面生成了富钡层,而铜则主要以+1价的形式存在于富钡层表面。与厚膜相比,在800℃以上薄膜与衬底的原子扩散和固态化学反应对于膜超导电性的损害更显著。
The angular distribution XPS method was used to study the changes of surface elemental concentrations and the atomic diffusion and solid-state chemical reaction between the YBCO film and the substrate ZrO_2 during the heat treatment. The results show that both the copper surface enrichment and the barium surface concentration are low after heating at a temperature in the range of about 530 to 720 ° C for both the thin film (about 0.1 μm) and the thicker film (about 1 to 1.5 μm). After heating above 800 ℃ copper surface concentration significantly reduced, the higher the temperature, the more the reduction. The chemical reaction between the film and the substrate is also exacerbated by the temperature increase. For example, after heated at 890 ℃, barium diffuses into the ZrO_2 substrate, and the content of copper in the film is still mainly at +2. After heating at 950 ℃, the surface of the substrate produces a barium-rich layer, while the copper is mainly in the form of +1 Exist in barium rich surface. Atomic diffusion and solid-state chemical reactions of the thin film with the substrate at temperatures above 800 [deg.] C are more detrimental to the superconductivity of the film than thick films.