利用差异式离子泵在同轴磁控管上作动态排气,以抽除管子在脉冲老炼或工作时放出的气体。由于同轴磁控管在排气过程中,电子轰击内腔,而难以排除外腔、调谐活塞以及衰减负载等的出气问题。这些部件在老炼或工作时,在高频能量的作用下,将会放出大量的气体,致使管子不能正常工作,甚至真空度下降,以至阴极中毒、打火等,用一附加泵抽除这些气体是 The use of differential ion pump in the coaxial magnetron for dynamic exhaust, to remove the tube in the pulsed aging or work release gas. As the coaxial magnetron in the exhaust process, the electron bombardment of the lumen, and difficult to rule out the outer cavity, tuning the piston and the attenuation of the load and other gas problems. During the aging or working hours, these components will emit a large amount of gas under the action of high-frequency energy, so that the pipes can not work normally, even the vacuum is reduced, and the cathodes are poisoned and sparked. An additional pump is used to remove these Gas is