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一、容栅国内外发展状况依靠改变电容两个极板之间的距离进行小位移非接触式测量的方法由来已久,但是由于传感器输出的非线性和分布电容的干扰没有得到解决,致使电容传感器的应用在一个很长的时期内只局限于微小的测量范围内。二十世纪七十年代,随着集成电路的迅速发展以及电容传感器采用了周期性改变耦合面积的设计方法,为解决上述两个问题提供了条件,从而扩大了量程。又由于电容传感器(下称容栅)可以制成体积小,成本低,速度快的量仪,使得容栅在近十年内得到了迅速的发展和应用。把容栅与集成电路结合在一起,进行直
First, the development of grid at home and abroad Relying on changing the distance between the two plates of the capacitor for small displacement non-contact measurement method for a long time, but due to the sensor output nonlinear and distributed capacitance interference has not been resolved, resulting in capacitance The application of the sensor is limited to a small measurement range over a long period of time. In the 1970s, with the rapid development of integrated circuits and the design of capacitive sensors that periodically change the coupling area, the above two problems were solved to expand the measuring range. And capacitive sensors (hereinafter referred to as capacitive grid) can be made small, low cost, high speed meter, making capacitive grid in the past decade has been rapid development and application. The grid together with the integrated circuit, straight