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介绍了改造国产镀膜机的继电器控制线路的方法,从而实现其与INFICONIC/5晶振薄膜沉积监视器之间接口电路的转接。生产试验表明,采用此法改造后的装置可实现对多层光学薄膜的高精度、快速自动化监控。
The method of remanufacturing the relay control circuit of domestic coating machine is introduced in order to transfer the interface circuit between it and INFICONIC / 5 crystal film deposition monitor. Production tests show that this method can be achieved after the transformation of multi-layer optical thin film high-precision, fast automated monitoring.