新型的细胞外电信号传感芯片是采用0.6μm标准CMOS工艺设计制造,片上集成了6×6单元有源传感阵列、模拟多路选择器、输出缓冲器、参考源和数字控制电路。有源传感单元面积为60μm×60μm,包含15μm×15μm的传感电极和预处理电路,能够线性放大幅值范围100μV~25mV的微小信号,电压增益为40dB。并采用相关二次采样工作模式降低固定模式噪声,提高传感器的精度。在标准CMOS工艺基础上,应用无电浸镀金改进传感电极的生物兼容性,并采用特殊封装技术提高芯片在溶液环境中的稳定性。溶液中模拟生物信号测量验证了该芯片的功能。 The new extracellular signal-sensing chip is designed and fabricated on a 0.6μm standard CMOS process with a 6 × 6-cell active sensing array, an analog multiplexer, an output buffer, a reference source, and a digital control circuit. Active sensing cell area of ​​60μm × 60μm, including 15μm × 15μm sensing electrodes and preconditioning circuit, can linearly amplify small signal amplitude range of 100μV ~ 25mV, the voltage gain of 40dB. And use the relevant sub-sampling mode to reduce the fixed mode noise and improve the accuracy of the sensor. Based on the standard CMOS process, electroless gold plating is used to improve the biocompatibility of sensing electrodes and the special packaging technology is used to improve the stability of the chip in a solution environment. Simulated biosignal measurements in solution validated the function of the chip.