论文部分内容阅读
1 Introduction Theauthorshavebeenworkingonanewsur faceencoderfordetectingmulti degree of freedom(MDOF)translationalandtiltmotionsofprecisionstages[1] .Thesurfaceencoderconsistsoftwofun damentalelements :asinusoidalmicrostructuredmetrologysurface ,whic
1 Introduction Theauthorshavebeenworkingonanewsur faceencoderfordetectingmultirationof freedom (MDOF) translationalandtiltmotionsofprecisionstages [1] .Thesurfaceencoderconsistsoftwofun damentalelements: asinusoidalmicrostructuredmetrologysurface, whic