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用化学气相沉积法(CVD)通过碳热还原反应在Si(100)衬底上以Ag纳米颗粒为催化剂制备了糖葫芦状的SiC纳米棒。硅源为溶胶凝胶制备的SiO_2,碳源为炭粉。采用X射线分析衍射仪(XRD)、扫描电镜(SEM)、透射电镜(TEM)、高分辨率透射电镜(HRTEM)、荧光光谱(PL)对产物的组成、形貌、微观结构等进行了表征。结果表明,SiC纳米棒都其有周期性的凹凸,形状貌似糖葫芦状,长度范围为300~600 nm,而直径为30~50 nm。纳米结构生长机制为VLS生长模式,其中Ag催化剂对其形貌起到至关重要的影响。室温下SiC纳米棒的PL发光峰与块体SiC的发光特征峰相比有蓝移。
The gourd-shaped SiC nanorods were prepared by chemical vapor deposition (CVD) on a Si (100) substrate by Ag thermal reduction using Ag nanoparticles as a catalyst. The silicon source is SiO 2 prepared by sol-gel, and the carbon source is carbon powder. The composition, morphology, microstructure of the product were characterized by XRD, SEM, TEM, HRTEM and PL. . The results show that the SiC nanorods have periodic irregularities, the shape looks like the same as the gourd-shaped, the length of the range of 300 ~ 600 nm, and the diameter of 30 ~ 50 nm. The growth mechanism of nanostructures is VLS growth mode, in which Ag catalyst plays a crucial role in the morphology. The PL emission peak of SiC nanorods at room temperature has a blue shift compared with the luminescence peak of bulk SiC.