过去有人阐明了利用声表面波(SAW)器件制作压力敏感器的可能性.SAW压力敏感器可以在振荡器的反馈电路上设置一个延迟线或谐振器构成.当一个负载作为弯曲力矩加到压电基片上时,则产生如图1所示的现象,它改变了表面波速度,进而改变了振荡器的中心频率.因此,当加上一个变化的负载时,则在振荡器的输出端产生一个调频信号,该调频信号含有压力信号的信息.同时,SAW压力换能器 In the past, the possibility of making pressure sensors using SAW devices has been clarified.SAW pressure sensors can be constructed by providing a delay line or resonator on the oscillator’s feedback circuit.When a load is applied as a bending moment to the pressure On the electrical substrate, the phenomenon shown in Figure 1 occurs, which changes the surface wave velocity, which in turn changes the center frequency of the oscillator. Thus, when a varying load is applied, it is generated at the output of the oscillator A frequency modulated signal containing the information of the pressure signal and the SAW pressure transducer