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在加速器上,利用不同能量的D~+离子束对Ti膜进行连续辐照,利用慢正电子湮没技术和SEM对束流辐照前后Ti膜进行表征.结果表明,D~+离子束对Ti膜造成辐照损伤,随D~+离子束能量增大,辐照损伤的程度加重;辐照损伤最大值在0.3μm处;D~+离子束对Ti膜表面造成不同程度的烧蚀,随D~+离子束能量增加,膜表面烧蚀程度增加,膜表面几何不均匀性导致膜表面出现选择性烧蚀.数值计算表明,随能量增加,D~+离子在Ti膜中的能量沉积增大,这与SEM观测结果相符.
The Ti film was continuously irradiated by D ~ + ion beams with different energies and the Ti films were characterized by means of slow positron annihilation and SEM before and after the beam irradiation.The results show that D ~ The irradiation damage was increased with the increase of energy of D ~ + ion beam, the degree of radiation damage was aggravated; the maximum value of irradiation damage was at 0.3μm; D ~ + ion beam caused different ablation on the surface of Ti film, The energy increase of D ~ + ion beam and the increase of ablation on the surface of the film resulted in the selective ablation of the surface of the film due to the geometrical inhomogeneity of the film surface. Numerical calculations show that the energy deposition of D ~ + ions in the Ti film increases with increasing energy Large, consistent with SEM observations.