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金刚石/硅声表面波基片的金刚石层晶粒的细化有利于传播损耗的降低,本文采用热丝化学气相沉积法进行了硅基体上沉积细晶粒金刚石工艺的初步探索。探讨了基体温度、气压、氩气和甲烷浓度等因素对金刚石细晶粒生长的影响。对相应样品进行了扫描电镜和拉曼散射谱分析。结果表明:在低气压范围,相同氩气浓度,随着气压的降低,甲烷浓度也要相应降低,能保证金刚石结晶质量。同时,降低气压达到一定值后,金刚石晶粒尺寸变小,经测试可达到纳米级。
The thinning of the diamond layer grains of the diamond / silicon surface acoustic wave substrate is conducive to the reduction of propagation loss. In this paper, the hot filament chemical vapor deposition method was used to study the deposition of fine grained diamond on the silicon substrate. The effects of substrate temperature, pressure, argon and methane concentration on the fine grain growth of diamond were discussed. The corresponding samples were analyzed by scanning electron microscopy and Raman scattering spectra. The results show that: in the low pressure range, the same argon concentration, with the decrease of pressure, methane concentration should be reduced accordingly, to ensure the diamond crystal quality. At the same time, reducing the pressure reaches a certain value, the diamond grain size becomes smaller, the test can reach nanoscale.