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温度敏感性是影响波导微环光学生化传感器性能的重要因素。从微环谐振方程出发分析了微环传感器温度敏感性产生的机理,研究了以SU8-NOA61-SU8三明治结构聚合物衬底代替传统硅衬底,利用衬底的热膨胀效应抵消波导的热光效应,来消除聚合物波导微环光学生化传感器的温度敏感性。采用ANSYS软件对三明治衬底的厚度进行了仿真设计,得到了温度不敏感条件下的衬底厚度参数。对SU8和NOA61旋涂成膜工艺进行了实验研究,得到SU8和NOA61的膜厚控制精度分别为0.07μm@20 r/min和0.34μm@20 r/min。分析得到三明治聚合物衬底波导微环传感器的温度敏感性和探测极限值,达到了带有温控装置的硅衬底聚合物波导微环传感器的性能。
Temperature sensitivity is an important factor affecting the performance of waveguide micro-ring biosensor. The mechanism of the temperature sensitivity of the microring sensor is analyzed based on the microring resonance theory. The SU8-NOA61-SU8 sandwich polymer substrate is used to replace the traditional silicon substrate. The thermo-optic effect of the waveguide is canceled by the thermal expansion effect of the substrate , To eliminate the temperature sensitivity of the polymer waveguide microring optical biochemical sensor. The thickness of the sandwich substrate was simulated by ANSYS software, and the parameters of substrate thickness under temperature insensitivity were obtained. The SU8 and NOA61 spin-on film-forming process were studied experimentally, and the film thickness control precision of SU8 and NOA61 were 0.07μm@20 r / min and 0.34μm@20 r / min, respectively. The temperature sensitivity and detection limit of sandwich polymeric microgrip sensor were analyzed and the performance of silicon substrate polymeric microgrip sensor with temperature control device was achieved.