阐述了对硅悬臂梁谐振子进行光激励研究的结果。结果表明，谐振子的振幅与激励光斑的位置以及所激励的模态有关。在模态的两节点的中心位置进行激励，可得到最大的振幅，而且振幅随着激励光斑偏离中心位置而下降；在节点处激励时，振幅达到最小。上述结论也适用于其它点热源激励的微机械谐振器，并为点热源激励的微机械谐振器的设计和制作提供了依据 The results of the research on the optical excitation of silicon cantilever resonator are described. The results show that the amplitude of the harmonic oscillator is related to the position of the excitation spot and the excited mode. The excitation at the center of two nodes in the modal can obtain the maximum amplitude, and the amplitude decreases as the excitation spot deviates from the center; when the node is excited, the amplitude is minimized. The above conclusion also applies to the other points of the micromechanical resonator excited by the heat source and provides a basis for the design and fabrication of the micromechanical resonator excited by the point heat source