研究了利用低能离子束技术，在单晶硅片等多种基体表面形成类金刚石薄膜（ＤＬＣ膜）。利用透射电镜、Ｘ射线光电子能谱及拉曼光谱等分析手段对该膜进行了显微结构分析，发现类金刚石膜是含有金刚石及其它碳相的混合碳膜。对该膜性能测试表明，该膜类似金刚石的性能，其光学、电学、机械及化学性质优异。探讨了类金刚石膜生长的机理，对类金刚石膜的一些可能的应用进行了研究 The DLC film was formed on the surface of a variety of substrates such as monocrystalline silicon wafer by using low energy ion beam technique. The microstructure of the film was analyzed by transmission electron microscopy, X-ray photoelectron spectroscopy and Raman spectroscopy. It was found that diamond-like carbon film is a hybrid carbon film containing diamond and other carbon phases. The film performance test showed that the film similar to the performance of diamond, its optical, electrical, mechanical and chemical properties. The mechanism of diamond-like carbon film growth is discussed, and some possible applications of diamond-like carbon film are studied