介绍了一种减小交叉耦合的三维微加速度计的设计,该设计采用全差分电容式结构,X轴和Y轴采用梳齿电容式加速度计,Z轴采用扭摆电容式加速度计,三个轴向各自具有不同的敏感质量块,能够有效减小交叉耦合度。通过公式计算得到三个轴向的机械噪声,X轴为-60μg/Hz,Y轴为-66μg/Hz,Z轴为-53μg/Hz。从计算结果来看,三个维度的噪声系数较低,在电路噪声保证足够小的情况下,该三维微加速度计能够达到较高的精度。最后,采用COMSOL MULTIPHYSICS软件对该结构三个维度进行了模态仿真,仿真结果表明该设计能够有效减小三个维度的交叉耦合度。 The design of a three-dimensional micro-accelerometer with reduced cross-coupling is introduced. The design uses a fully differential capacitive structure with a comb-tooth capacitive accelerometer in the X-axis and the Y-axis, a wobble capacitive accelerometer in the Z-axis, To each have different sensitive mass, can effectively reduce the cross-coupling degree. Three axial mechanical noise were calculated using the formula: -60 μg / Hz for the X-axis, -66 μg / Hz for the Y-axis, and -53 μg / Hz for the Z-axis. From the calculation results, the noise figure of the three dimensions is low, and the three-dimensional micro-accelerometer can achieve higher accuracy when the circuit noise is ensured sufficiently small. Finally, COMSOL MULTIPHYSICS software was used to simulate the three dimensions of the structure. The simulation results show that the design can effectively reduce the cross-coupling of three dimensions.