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场致发射是一种新型显示技术,具有良好应用前景,场发射显示器的核心内容是场发射阴极材料,纳米金刚石由于低表面粗糙度、低场发射强度、高发射电流密度、大比表面积、网状结构以及高密度悬挂键等优秀电化学性能成为场发射的理想阴极材料。本文阐述了化学气相沉积法制备纳米金刚石薄膜的沉积装置、预处理和工艺参数,并介绍了金刚石掺杂机理和掺入元素的研究现状。
Field emission is a new display technology with good application prospects. The core of field emission display is field emission cathode material. Due to its low surface roughness, low emission intensity, high emission current density, large specific surface area, Like structure and high-density dangling bonds and other excellent electrochemical properties become the ideal field emission cathode material. In this paper, the deposition equipment, pretreatment and process parameters for the preparation of nano-diamond films by chemical vapor deposition are described. The research status of diamond doping and doped elements are also introduced.