It is very important to measure local deformations for an in-depth understanding of mechanical properties and fracture mechanism of structural and functional materials.In this paper, different types of model grid fabrication methods and many types of electron Moire methods using an electron beam drawing system,a scanning electron microscope or a focus ion beam are reported, together with their applications in the measurement of deformations occurring in various engineerings and materials science research. It is very important to measure local deformations for an in-depth understanding of mechanical properties and fracture mechanisms of structural and functional materials. This paper, different types of model grid fabrication methods and many types of electron Moire methods using an electron beam drawing system , a scanning electron microscope or a focus ion beam are reported, together with their applications in the measurement of deformations occurring in various engineerings and materials science research.