论文部分内容阅读
室温下用高能量密度脉冲等离子体在硬质合金刀具上成功淀积了硬度高、耐磨损、膜基结合良好的氮化钛涂层.俄歇分析表明,薄膜与基体间界面大于250nm;涂层与基体的结合良好,纳米划痕实验临界载荷达90mN以上.纳米压痕实验表明,氮化钛涂层具有很高的硬度和杨氏模量,分别达27GPa和450 GPa以上.涂层刀具切削实验表明,刀具可用于HRC高达58～62的CrWMn钢切削,且磨损量较低,寿命长.微观结构分析表明,高能量密度等离子的注入效应、晶粒细化效应等对薄膜硬度、杨氏模量、膜基结合力和抗磨损性能等物理性能的改善起主导作用.
The TiN coating with high hardness, good abrasion resistance and good film base bonding was successfully deposited on the carbide tool at room temperature by pulsed plasma with high energy density.The Auger analysis showed that the interface between the film and the substrate was larger than 250 nm. The bond between the coating and the substrate is good, and the critical load of the nano-scratch test reaches more than 90mN. The nanoindentation experiment shows that the TiN coating has high hardness and Young’s modulus of 27GPa and 450GPa respectively. Cutting experiments show that the cutting tool can be used to cut CrWMn steel with HRC up to 58 ~ 62, and the wear amount is low and the service life is long.Microstructure analysis shows that the effect of high energy density plasma injection, grain refinement, Young’s modulus, film-based bond strength and wear resistance and other physical properties improve play a leading role.