【摘 要】
：
CSM系列自动化半导体测试系统是由微型计算机、接口电路单元以及各种模拟测量仪器组合构成的专用测试系统.测量仪器是1MHz电容仪、微电流仪、线性斜坡电压发生器等等.本文重
【机 构】
：
西安交通大学电子工程系,西安交通大学电子工程系,西安交通大学电子工程系,西安交通大学电子工程系
论文部分内容阅读
CSM系列自动化半导体测试系统是由微型计算机、接口电路单元以及各种模拟测量仪器组合构成的专用测试系统.测量仪器是1MHz电容仪、微电流仪、线性斜坡电压发生器等等.本文重点介绍CSMⅢ型系统.该系统已配备七套应用软件,既可用于集成电路芯片生产过程中关键工序的在线工艺检测,也可用于半导体器件的研究工作.本系统可以替代进口的类似检测设备.
CSM series of automated semiconductor test system is composed of a microcomputer, interface circuit unit and a variety of analog measuring instruments constitute a dedicated test system. Measuring instruments are 1MHz capacitance meter, micro-current meter, linear ramp voltage generator, etc. This article focuses on CSM Ⅲ Type system.The system has been equipped with seven sets of application software, which can be used for on-line process detection of key processes in the production process of integrated circuit chips and research of semiconductor devices.The system can replace similar imported testing equipment.
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