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根据Langmuir探针理论,讨论了由双探针特性曲线得到电子温度的近似处理方法,在此基础上研制出了低温等离子体实时诊断仪,并给出了应用实例。
According to the Langmuir probe theory, the approximate treatment method of the electron temperature obtained by the double probe characteristic curve is discussed. Based on this, a real-time low-temperature plasma diagnostic instrument is developed and an application example is given.