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以硅作为基底材料,采用深反应离子刻蚀(DRIE)技术加工出含有新型锯齿流道和传统锥形管的微泵,整个微泵结构为聚二甲基硅氧烷(PDMS)-玻璃-硅-PDMS式.采用阳极键合方法对硅和玻璃之间进行封装.PDMS和玻璃、PDMS和硅之间的封装采用紫外线照射方法,使PDMS表面改性,从而达到不可逆密封.分别对两种微泵在不同电压、频率以及波形驱动下的最大流量(MFR)和最大压力头(MPH)进行测试与比较,发现在固定频率下,两个微泵的最大流量和最大压力头均随驱动电压升高而升高,并且正弦波驱动下的效果要好于其他两种驱动波形;在固定电压下,最大流量随着频率升高在60Hz和200Hz两个频率点同时达到最大,最大压力头则在60～600Hz内一直处于最大值不变;锯齿流道微泵的最大流量和最大压力头明显高于传统锥形微泵.由于流道侧面环形面积的存在增加了流通面积,新形锯齿形流道微泵的效率明显高于传统锥形管微泵.
Using silicon as a base material, micro-pumps with new serrated channels and conventional conical tubes were fabricated by deep reactive ion etching (DRIE). The whole micro-pump structure was polydimethylsiloxane (PDMS) - glass- Silicon-PDMS-type.Anode bonding between the silicon and glass packaging.PDMS and glass, PDMS and silicon packaging between the use of UV irradiation method, so that PDMS surface modification, so as to achieve irreversible sealing.On the two Micropumps under different voltage, frequency and waveform driven maximum flow (MFR) and the maximum pressure head (MPH) were tested and compared, found at a fixed frequency, the maximum flow and the maximum pressure of the two micropumps with the drive voltage Rise and increase, and the effect of the sine wave drive is better than the other two drive waveforms; at a fixed voltage, the maximum flow with the frequency increases at 60Hz and 200Hz two frequency points at the same time to achieve the maximum pressure head in The maximum flow rate and the maximum pressure head of the sawtooth flow path micro pump are obviously higher than those of the conventional conical micro pump because of the increase of the circulation area in the side ring area of the flow path, Road micro-pump The efficiency is significantly higher than the traditional conical tube micro-pump.