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利用微波等离子体化学气相沉积技术在光学玻璃衬底上制备了金刚石膜，利用原子力显微镜技术及显微力学探针研究了膜层的表面形貌及显微力学特性。结果表明，金刚石膜的晶粒尺寸小于100 nm，表面粗糙度小于10 nm，具有极高的显微硬度及弹性模量，能够满足光学材料表面的抗冲击、耐磨等要求。
The diamond films were prepared on optical glass substrates by microwave plasma chemical vapor deposition. The surface morphology and micromechanical properties of the films were studied by atomic force microscopy and micromechanical probe. The results show that the grain size of diamond films is less than 100 nm and the surface roughness is less than 10 nm. The films have very high microhardness and elastic modulus to meet the requirements of impact resistance and wear resistance of optical materials.