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介绍了一种阵列式硅压阻压力传感器 ,就其设计结构、生长工艺及实验结果进行了概要地阐述 ,其生长工艺将微机械加工工艺和半导体平面CMOS工艺融为一体。
An arrayed silicon piezoresistive pressure sensor is introduced and its design structure, growth process and experimental results are briefly described. The growth process combines the micromachining process with the semiconductor planar CMOS process.