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采用Nd:YAG三倍频激光对光学薄膜进行了预处理。实验发现三倍频激光预处理对薄膜的抗激光损伤能力有明显的影响,影响规律比较复杂,归纳得出合适激光预处理能量密度与测试激光能量密度有关。理论上借助杂质诱导薄膜损伤的概率统计模型,从激光预处理引起的激光微区退火以及形成微尺寸损伤两个主要方面着手,很好地解释了复杂的实验现象。总体上看,预处理激光能量密度低于激光退火所需临界能量密度时,预处理效果以负作用为主;预处理激光能量密度高于激光退火所需临界能量密度,且低于激光诱导薄膜微损伤所需临界能量密度时,预处理效果以改善薄膜抗激光损伤能力为主,预处理激光能量密度要尽量选在这个范围内;预处理激光能量密度高于激光诱导薄膜微损伤所需临界能量密度时,预处理效果同样以负作用为主。
Optical films were pretreated with Nd: YAG triplet laser. The experimental results show that the triple frequency laser pretreatment has a significant effect on the anti-laser damage ability of the film, and the influence law is complicated. The suitable laser pretreatment energy density is related to the test laser energy density. Theoretically, the probabilistic statistical model of impurity-induced thin-film damage is introduced. The two main aspects of laser micro-area annealing caused by laser pretreatment and the formation of micro-scale damage are well explained. In general, the preconditioning effect is dominated by the negative effect when the pretreatment laser energy density is lower than the critical energy density required for laser annealing. The pretreatment laser energy density is higher than the critical energy density required for laser annealing and lower than the laser induced film The critical energy density required for micro-damage, the pretreatment effect to improve the anti-laser damage ability of the film-based, pretreatment laser energy density as far as possible choose this range; pretreatment laser energy density than laser-induced micro-damage required critical Energy density, the same preconditioning effect to negative effects.