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采用磁控溅射法制备了Ti N薄膜,研究了其与激光表面织构的摩擦学协同效应,并基于磨损表面分析,探讨了其减摩抗磨机理。结果表明:Ti N薄膜与表面织构具有优异的协同抗磨作用,但减摩作用不明显。织构化Ti N薄膜的磨损率相对于原始Ti N薄膜降低约20%。表面织构因“机械捕捉效应”和“微存储效应”降低Ti N薄膜磨损表面的物质损失,磨损机理为氧化磨损和磨粒磨损。
TiN thin films were prepared by magnetron sputtering. The tribological synergetic effect of TiN thin films on laser surface texture was studied. Based on wear surface analysis, the tribological mechanism of TiN thin films was also discussed. The results show that the TiN film has excellent synergistic antiwear effect with the surface texture, but the antifriction effect is not obvious. The wear rate of the textured TiN film is reduced by about 20% relative to the original TiN film. Surface texture reduces material loss on the TiN film wear surface due to “mechanical catching effect” and “micro-storage effect”. Wear mechanisms are oxidative wear and abrasive wear.