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Vacuum robot is an essential device in advanced semiconductor manufacturing. This paper introduces the kinematic modeling of a kind of parallel vacuum robot and the implementation of 3D graphical simulation based on OpenGL and STL files in Visual C++ program interface, which also lays the foundation of real-time online monitoring of the robot.
Vacuum paper is an essential device in advanced semiconductor manufacturing. This paper introduces the kinematic modeling of a kind of parallel vacuum robot and the implementation of 3D graphical simulation based on OpenGL and STL files in Visual C ++ program interface, which also lays the foundation of real -time online monitoring of the robot.