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由航空航天工业部一院102所承担的测头旋转式圆度仪技术改造任务于1992年5月26日通过鉴定。经过改造,仪器精度由0.05μm提高至小于0.01μm,达到国际先进水平。改造后的仪器具有主轴误差自动修正功能;按四种圆度评定方法自动评定圆度、显示与记录圆图,512个采样点圆度偏差打印输出、存盘保存和谐波分析功能以及自动转位检定主轴误差和测量超精圆度功能。此成果可挖掘设备潜力,节约投资,解决标准石英半球
The task of technical transformation of the probe rotary roundness instrument undertaken by the No.102 Hospital of the Ministry of Aerospace Industry was approved on May 26, 1992. After transformation, the accuracy of the instrument is increased from 0.05μm to less than 0.01μm, reaching the international advanced level. After the transformation of the instrument with automatic spindle error correction; according to four kinds of circularity assessment method to automatically assess the roundness, display and record the circular chart, 512 sampling points roundness deviation printout, save the preservation and harmonic analysis function and automatic indexing Check the spindle error and measurement of super-round function. This result can tap the potential of equipment, save investment and solve the standard quartz hemisphere