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以四甲基硅烷、反式二丁烯和氢气为工作气源,采用化学气相沉积-高温热解法成功制备了壁厚约21μm的非晶SiC微球。利用能量色散X射线光谱仪、X射线光电子能谱仪、X射线衍射仪、Raman光谱仪、扫描电子显微镜、白光干涉仪和X射线照相机对SiC微球的化学成分、结晶状态、表面形貌与粗糙度以及密度与球形度等进行了测量和分析。结果表明:在无氧环境下,通过450~900℃的高温热解及致密化可将在聚α甲基苯乙烯芯轴上沉积的掺硅碳氢聚合物涂层转变成致密的SiC微球。SiC微球呈非晶态,其C/Si原子比约为1.3,主要含有C—Si键和C=C键,微观结构呈无规则状且颗粒分布均匀,密度、球形度和壁厚均匀性分别为2.62 g/cm~3、99.8%和96.8%。
Amorphous SiC microspheres with a wall thickness of about 21 μm were successfully prepared by chemical vapor deposition-pyrolysis method using tetramethylsilane, trans-dibutylene and hydrogen as working gas sources. The chemical composition, crystalline state, surface morphology and roughness of SiC microspheres were characterized by energy dispersive X-ray spectroscopy, X-ray photoelectron spectroscopy, X-ray diffraction, Raman spectroscopy, scanning electron microscopy, white light interferometer and X-ray camera As well as density and sphericity were measured and analyzed. The results show that in the anaerobic environment, the silicon-containing hydrocarbon polymer coating deposited on the poly (α-methylstyrene) mandrel can be transformed into dense SiC microspheres by high temperature pyrolysis and densification at 450-900 ℃ . SiC microspheres were amorphous, the C / Si atomic ratio of about 1.3, mainly containing C-Si bond and C = C bond, the microstructure was irregular and uniform particle distribution, density, sphericity and wall thickness uniformity Respectively, 2.62 g / cm ~ 3, 99.8% and 96.8%.