论文部分内容阅读
为了解决压阻式加速度计的动态特性欠佳的共性,避免微加速度计在工作过程中因为共振导致结构损坏,在结构设计过程中选择合理固有频率是至关重要的.文中针对一种四边八梁结构的高g值压阻式加速度计,通过力学知识,简化结构并推导出其固有频率的理论计算公式,利用有限元仿真软件和测试高g值加速度计频率特性的方法,对该理论公式进行了仿真和实验验证,证明该理论公式的正确性和可用性.同时,文中介绍的简化结构的模型,能够用于复杂结构的应力、应变等的求解,验证的实验方法可以用于高g值加速度计固有频率的测试.而且,在加速度计结构的设计过程中,直接利用固有频率公式计算出结构的固有频率,从而简化加速度计的结构设计和优化过程,设计出最合理的固有频率结构.
In order to solve the poor commonality of the piezoresistive accelerometer's dynamic characteristics and avoid the structural damage caused by resonance during the operation of the micro-accelerometer, it is of crucial importance to select a proper natural frequency in the structural design process.In this paper, Beam structure of high g-value piezoresistive accelerometer, through mechanical knowledge, simplify the structure and derive its natural frequency of the theoretical formula, the use of finite element simulation software and high g-value accelerometer frequency characteristics of the method, the theoretical formula Simulation and experimental verification are carried out to prove the correctness and usability of the theoretical formula.At the same time, the simplified structure model introduced in this paper can be used to solve the stress and strain of complex structures. The experimental verification method can be used for high g In the process of designing the accelerometer structure, the natural frequency of the structure is directly calculated by using the natural frequency formula to simplify the structure design and optimization process of the accelerometer, and the most reasonable natural frequency structure is designed.