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阐述了无源元件在MMIC设计中的重要性及MIM电容模型参数提取的几种方法。以简化的MIM电容等效电路为基础,通过IC-CAP建模软件,建立平板电容的等效模型模拟其电学特性。根据实测数据提取相关模型参数,同时与实际测试的MIM电容值进行对比,对ADS元件库中电容模型的关键参数做了修改和验证。经过在GaAs工艺线实际流片统计、验证,该模型在40 GHz以下实测的S参数与电磁仿真结果基本吻合,平板电容的误差控制在3%以内,可用于40 GHz以下GaAs MMIC的电路设计和仿真。
The importance of passive components in MMIC design and several methods of parameter extraction of MIM capacitor model are expounded. Based on the simplified MIM capacitor equivalent circuit, an equivalent model of the plate capacitor is built to simulate its electrical characteristics through IC-CAP modeling software. According to the measured data, the related model parameters were extracted, and compared with the actual measured MIM capacitance, the key parameters of capacitance model in ADS library were modified and verified. After the actual flow statistics in the GaAs process line, it is verified that the measured S-parameter of the model under 40 GHz basically agrees with the electromagnetic simulation result, the error of the plate capacitor is controlled within 3%, and can be used in circuit design of GaAs MMIC under 40 GHz and simulation.