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高Q值MEMS电容式加速度计因具有很小的机械噪声,满足于高精度测量的需要,但欠阻尼的传感器系统动态性能较差,因此需要在闭环检测电路中通过补偿反馈模块施加电学阻尼,以降低系统Q值,改善系统的动态响应。首先通过MATLAB/SIMULINK仿真建立了带有延时的系统模型,进一步结合实际PCB板的测量,分析了不同反馈补偿参数下的阶跃响应和幅频响应曲线。实验结果表明,合适的反馈补偿参数能有效地降低系统Q值,改善动态响应。最后得出了该电容式加速度计在闭环系统下的较优比例微分参数的选择策略。
Due to the low mechanical noise, high-Q MEMS capacitive accelerometers meet the needs of high-precision measurement. However, the under-damped sensor system has poor dynamic performance. Therefore, it is necessary to apply electrical damping in the closed-loop detection circuit by compensating the feedback module, To reduce the system Q value, improve the system’s dynamic response. Firstly, the system model with delay is established by MATLAB / SIMULINK simulation. The step response and the amplitude-frequency response curve under different feedback compensation parameters are analyzed according to the actual PCB measurement. The experimental results show that the appropriate feedback compensation parameters can effectively reduce the Q value of the system and improve the dynamic response. Finally, the selection strategy of the optimal proportional differential parameters of the capacitive accelerometer in the closed-loop system is obtained.