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目的对一种高精度、高频响的电容测微仪系统进行改进．方法以８阶Ｂｕｔｔｅｒ－ｗｏｒｔｈ滤波器ＭＡＸ２９１为核心元件，设计了该系统的动态测量电路，提出了电容测微仪系统动态特性的测试与标定方法．结果与结论改进后的电容测微仪在±１０μｍ的量程内非线性误差最大不超过０．８０％，重复性精度优于０．１５％，测量精度优于０．１０μｍ，频响范围达４．２ｋＨｚ．
Objective To improve a high accuracy and high frequency capacitance micrometer system. Methods The 8-order Butter-worth filter MAX291 is taken as the core component. The dynamic measuring circuit of this system is designed. The testing and calibration method of the dynamic characteristic of the capacitive micrometer system is proposed. RESULTS AND CONCLUSION The improved capacitance micrometer has a maximum non-linearity error of more than 0.80% within ± 10μm, repeatability better than 0.15%, measurement accuracy better than 0.10μm and frequency response range up to 4 .2kHz.