STUDY OF CAPILLARY ELECTROPHORESIS ON MICROCHIP BASED ON MEMS

来源 :电子科学学刊：英文版 | 被引量 : 0次 | 上传用户：hudaxia110

【摘要】

：

Using a standard photolithographical procedure, chemical wet etching and thermal diffusion bonding technology, a chemical analysis device for Capillary Electrop

【作者】

：

WangMing LiWei 等

【机构】

：

StateKeyLab.OfTransducerTech.

【出处】

：

电子科学学刊：英文版

【发表日期】

：

2002年4期

【关键词】

：

电泳微芯片毛细管微电子机械基因芯片 Microchip Capillary elcctrophoresis MEMS

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论文部分内容阅读

Using a standard photolithographical procedure, chemical wet etching and thermal diffusion bonding technology, a chemical analysis device for Capillary Electrophoresis(CE) has been microfabricated on a planar glass substrate with a cross-column geometry.

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STUDY OF CAPILLARY ELECTROPHORESIS ON MICROCHIP BASED ON MEMS

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