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大面积光学级金刚石自支撑膜的制备和加工是近年来在CVD金刚石研究领域的最重要的技术进展之一;在军事和民用光学领域有非常重要的应用前景。综述了北京科技大学近年来在CVD金刚石膜光学应用领域的研究进展;给出了采用高功率直流电弧等离子体喷射(DCArc Plasma Jet)CVD工艺制备大面积光学级金刚石自支撑膜的研究结果;对所制备的光学级金刚石自支撑膜的光学、力学(机械)、热学、微波介电性能、抗氧化、抗热震、抗砂蚀和抗激光损伤等方面的最新研究结果,及其在高新技术领域中的应用前景及前沿问题进行了讨论。
The preparation and processing of large-area optical diamond self-supporting films are one of the most important technological advances in CVD diamond research field in recent years. It has very important application prospects in military and civil optics. In this paper, the research progress in the application of CVD diamond films in optical applications of Beijing University of Science and Technology was reviewed in this paper. The results of the research on the fabrication of self-supporting large-area optical diamond films by DCArc plasma jet CVD technology were presented. The latest research results of optical, mechanical (mechanical), thermal, microwave dielectric properties, oxidation resistance, thermal shock resistance, sand resistance and laser damage resistance of the prepared optical diamond self-supporting film and their application in high-tech The application prospects in the field and the frontier issues are discussed.