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设计了一个由3个步进电机驱动的扫描探针显微镜(Scanning probe microscope,SPM)基座。这个基座比普通的由一个电机驱动的基座要灵活,但基座的控制也相对复杂。基座的3个电动机由一个Arduino单片机来控制。在Arduino单片机里面还设计了一个状态机,通过这个状态机单片机与电脑上位机和一个射频遥控器进行通信。另外,本项目还用两个5状态LED来显示有限状态机(Finite state machine,FSM)的不同状态以及电动机和基座的运动状态。最后,通过测试和调试,本基座在Z方向上能实现700纳米的机械控制分辨率。
A Scanning Probe Microscope (SPM) pedestal driven by three stepper motors was designed. This base is more flexible than an ordinary base driven by a motor, but the base control is relatively complicated. The 3 motors on the base are controlled by an Arduino microcontroller. In the Arduino microcontroller also designed a state machine, through this state machine microcontroller and the PC and a radio remote control to communicate. In addition, the project also used two 5-status LEDs to show the different states of the Finite state machine (FSM) and the motions of the motor and base. Finally, through testing and commissioning, the base achieves 700 nanometers of mechanical control resolution in the Z direction.