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“纳米”是英文namometer的译名,是一种度量单位,1纳米为百万分之一毫米,即l毫微米,也就是十亿分之一米,约相当于45个原子串起来那么长。纳米结构通常是指尺寸在100纳米以下的微小结构。1982年扫描隧道显微镜发明后,便诞生了一门以0.1至100纳米长度为研究分子世界,它的最终目标是直接以原子或分子来构造具有特定功能的产品。因此,纳米技术其实就是一种用单个原子、分子制造物质的技术。关于纳米技术的概念,从迄今为止的研究状况看,分为三种。第一种,是1986年美国科学家德雷克斯勒博士在《创造的机器》一书中提出的分子纳米技术。根据这一概念,可以使组合分子的机器实用化,从而可以任意组合所有种类的分子,可以制造出任何种类的分子结构。这种概念的纳米技术未取得重大进展。第二种概念把纳米技术定位为微加工技术的极限。也就是通过纳米精度的“加工”来人工形成纳米大小的结构的技术。这种纳米级的加工技术,也使半导体微型化即将达到极限。现有技术即便发展下去,从理论上讲终将会达到限度。这是因为,如果把电路的线幅变小,将使构成电路的绝缘膜变得极薄,这样将破坏绝缘效果。
“Nano ” is the English translation of the namometer, is a unit of measurement, 1 nanometer is one millionth of a millimeter, that is l nanometers, which is one billionth of a meter, equivalent to about 45 atomic string together long. Nanostructures usually refer to microstructures below 100 nm in size. After the invention of the scanning tunneling microscope in 1982, a world of molecular lengths ranging from 0.1 to 100 nanometers was born. Its ultimate goal is to construct products with specific functions directly from atoms or molecules. Therefore, nanotechnology is actually a single atomic, molecular material technology. The concept of nanotechnology is divided into three types from the research status so far. The first is the molecular nanotechnology proposed by Dr. Drexler in 1986 by The American Scientist in The Machine of Creation. According to this concept, it is possible to make the machine of the combined molecules practical, so that it is possible to combine all kinds of molecules arbitrarily and to produce any kind of molecular structure. No major advances have been made in this concept of nanotechnology. The second concept positions nanotechnology as the limit of micromachining technology. That is, nanometer-sized structures are artificially formed by nano-precision “processing”. This nano-scale processing technology, but also the semiconductor is about to reach the limit of miniaturization. Even if the existing technology continues to develop, theoretically it will eventually reach the limit. This is because if the line width of the circuit is made smaller, the insulating film constituting the circuit becomes extremely thin, which will destroy the insulating effect.