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针对激光致盲武器的特殊要求,借助Macleod和TFCalc软件,选择H4和YbF3作为高低折射率材料进行膜系优化设计,采用电子束真空镀膜的方法并加以离子辅助沉积技术,通过正交矩阵实验对材料的工艺参数进行调整和优化,在蓝宝石基底上,制备了符合要求的宽带增透膜。镀膜后的蓝宝石基片在532、808、905、980和1064 nm波长处的透射率大于97%,中红外波段3~5μm的平均透射率大于92%。通过内保护层技术的引入,进一步提高了膜层的激光损伤阈值。该薄膜可以同时满足多个激光波长的使用要求,拓宽了其应用范围,降低了使用成本。
In order to meet the special requirements of laser blinding weapon, Macleod and TFCalc software were used to choose H4 and YbF3 as the material of high and low refractive index. The optimized coating design was adopted by electron beam vacuum coating and ion-assisted deposition technique. Material process parameters to adjust and optimize the sapphire substrate, prepared to meet the requirements of broadband AR coatings. The transmittance of the coated sapphire substrate is greater than 97% at 532, 808, 905, 980 and 1064 nm, and the average transmittance of 3-5 μm in the mid-infrared band is greater than 92%. Through the introduction of inner protective layer technology, the laser damage threshold of the film layer is further increased. The film can meet the requirements of multiple laser wavelengths at the same time, broaden the scope of its application and reduce the cost of use.