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在Ar+O_2混合气氛中射频反应性溅射Cd-Sn合金靶制备了透明导电Cd_2SnO_4(简称CTO)膜。实验表明,该膜的电学和光学性质依赖于混合气体中的氧浓度和衬底温度,最低电阻率为2.89×10~(-6)Ω·m,可见光区域最高透光率为95％。用X射线衍射测量了不同衬底温度下薄膜的结构。
Transparent conductive Cd 2 SnO 4 (referred to as CTO) films were prepared by RF reactive sputtering of Cd-Sn alloy target in Ar + O 2 mixed atmosphere. The experimental results show that the electrical and optical properties of the film depend on the oxygen concentration in the mixed gas and the substrate temperature. The lowest resistivity is 2.89 × 10 -6 Ω · m and the highest transmittance in the visible region is 95%. The structure of the films at different substrate temperatures was measured by X-ray diffraction.