Elements performance is greatly affected by their surface and subsurface integrity,especially for the brittle material.Prediction model of the subsurface damage would provide the insight into the grinding parameters effects and better control of them.In this paper,based on the classic brittle solid crack theory,prediction model of brittle material subsurface damage induced by brittle mode diamond grinding was established.Firstly,contact area calculation was modeled to estimate the involved grits number using the grit density.Based on the prediction model,grinding parameters effects were investigated.