2. 您的位置
3. 首页
4. 会议论文
5. Low Temperature High Density PECVD Thin Films Encapsulation

Low Temperature High Density PECVD Thin Films Encapsulation

来源 :2011年第三届微电子及等离子体技术国际会议 | 被引量 : 0次 | 上传用户：xhg123456

【摘 要】

：

Organic and printed electronics,such as OLED display and lighting,organic photovoltaic,and printed RFID,all require hermetical sealing to obtain good device lifetime.

【作 者】

：

Feng Li 

【机 构】

：

Suzhou Institute of Nano-Tech and Nano-Bionics, CAS, Suzhou, China

【出 处】

：

2011年第三届微电子及等离子体技术国际会议

【发表日期】

：

2011年9期

【关键词】

：

PECVD Thin Films Encapsulation Low Temperature and High Density Flexible 

下载到本地 , 更方便阅读

下载此文 赞助VIP

声明 : 本文档内容版权归属内容提供方 , 如果您对本文有版权争议 , 可与客服联系进行内容授权或下架

论文部分内容阅读

Organic and printed electronics,such as OLED display and lighting,organic photovoltaic,and printed RFID,all require hermetical sealing to obtain good device lifetime.

其他文献

Screening,isolation and identification of oleaginous Rhodococcus mutants for high lipid accumulation

会议

oleaginous Rhodococcuslipid accumulationdye-staininggas chromatography

Preparation of Si-Al Binary Oxide Coatings and its Electrical Properties

Si-Al binary oxide coatings for the flexible display or the solar cells were deposited on flexible substrates by means of ion assisted electron beam co-evaporation technique in vacuum evaporator.

会议

Si-Al Binary Oxide CoatingDielectricbarrier

Effects of in-situ remote plasma treatment on amorphous indium gallium zinc oxide thin film transist

Amorphous InGaZnO (a-IGZO) material is a post transition metal oxide which has recently garnered much attention as a active channel later in thin film transistor (TFTs) due to their excellent features

会议

IGZOThin film transistorco-sputtering

The Effects of Inserted Ag Layer on Electrical and Optical Properties and Bending Resistance Perform

Flexible display is one of the most important research topics in the display industry.According to the research and development of flexible display,flexible Touch-screen panel has also been studied.

会议

ITOAg. flexible displaycrack

Blue Phosphorescent OLEDs with Emission Layer of mCP:FCNIr(pic)

In the blue phosphorescent organic light-emitting diodes of N,N’-diphenyl-N,N’-bis-[4-(phen yl-m-tolylamino)-phenyl]-biphenyl-4,4’-diamine [DNTPD](400(A)) /hole transport layer [HTL] /emission layer /

会议

Blue EmissionmCPFCNIr(pic)Exciton Confinement

In situ monitoring of GaN substrate surface in ICP containing energetic electrons

In this paper we describe a new method for in situ monitoring GaN substrate surface in inductively-coupled plasmas (ICP) containing energetic electrons.

会议

In situGaNDamage densityICP

Characteristics of SiOx thin films deposited by modified chemical vapor deposition with the double a

The atmospheric pressure plasma enhanced chemical vapor deposition (AP-PECVD) is considered as an emerging technology which not only offers advantage in cost reduction due to the lack of bulky and exp

会议

Atmospheric Pressure PE-CVDSiOxDouble Discharge system

Study on Wet patterning of Gallium Indium Zinc Oxide Thin-Film Transistor with Copper metallization

Recently,transparent amorphous oxide semiconductors such as Ga-In-Zn-O (a-GIZO),In-Sn-O (ITO),Zn-O (ZnO),In-Ga-O (IGO) are expected for channel materials in liquid crystal displays because its high fi

会议

(a-GIZO)Wet etchingCopperMolybdenumThin Film Transistor

Bending characteristics of flexible amorphous InGaZnO thin film transistors with organic/inorganic m

In the display industry,transition metal oxide (TMO) materials have been reported as promising candidates replacing a-Si:H and poly-Si semiconductor due to the advantages of a low-cost low-temperature

会议

Thin film transistorflexible electronicsoxide semiconductormultilayer gate di

Nano-structured thin film materials for flexible and stretchable organic electronics

Development of the flexible materials with optical transparency,mechanical stability,light weight,low-cost farbication,and electrical stability is required for the application of the flexible and stre

会议

Flexible MaterialsStretchable MaterialsNanocomposite DielectricNanolaminated