Chemical vapor deposition(CVD)of polymer nanocoatings is a novel and promising approach towards surface functionalization of various materials,as well as the construction of a wide variety of microand nanoscale devices.The solventless nature of the process enables controlled deposition of polymer coatings on delicate,nanostructured substrates.In this abstract,we present our work of using iCVD method to functionalize micro-and nano-scaled substrates,such as vertically aligned carbon nanotubes(VACNTs)and nanoporous membranes,with conformal and controllable polymer thin coatings.The mild nature of the coating process enables perfect retention of the functional groups.Desired surface functionalities were thus achieved using different polymer coatings.Potential applications of each polymer coatings will also be discussed.