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Vanadium dioxide is well known for the reversible thermally-induced semiconductor-metal phase transition which is accompanied by large changes in electrical and optical properties near 68 ℃.In order to promote its practical application,Vanadium oxide thin film with reversible phase transition was prepared by reactive ion-beam sputtering and subsequent annealing,and the micro-analysis and properties testing were performed.Scanning electron microscopy (SEM) micrograph shows that this thin film is homogeneous and compact.Its grain size reaches to nanometer magnitude that is about 50nm.