Highly Reliable CMUT Cell Structure with Reduced Dielectric Charging Effect

来源 :2015两岸超声技术与医学研讨会 | 被引量 : 0次 | 上传用户:sdcwsjy
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Background,Motivation and Objective Capacitive micro-machined ultrasonic transducers (CMUTs), as an alternative of conventional piezoelectric transducers, have various advantages such as superior imaging quality and potential capability of circuit integration. However, CMUTs are hardly operated at high voltage to generate enough ultrasound power because the electrical charging effect of dielectrics in the CMUT cell degrades the receiving sensitivity after a long term operation.
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