【摘 要】
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Background,Motivation and Objective The integration of CMUT transducers with supporting electronic circuits is critical for the overall efficiency of the CMUT-based imaging systems and for a compact f
【机 构】
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Department of Electrical and Computer Engineering,NCSU,Raleigh,North Carolina,USA
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Background,Motivation and Objective The integration of CMUT transducers with supporting electronic circuits is critical for the overall efficiency of the CMUT-based imaging systems and for a compact form factor.The current interconnection methods for hybrid integration are based on TSV interconnects.
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