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采用差重法研究了Sb_2S_3和Sb_2O_3在氩气流中的挥发以及Sb_2S_3在Ar—O_2混合气流中的挥发,考察了温度和氧分压对挥发速率的影响。提出了以化学反应为主的动力学模型,导出了挥发速率表达式,算出了反应的表观活化能值。
The volatilization of Sb 2 S 3 and Sb 2 O 3 in argon flow and the volatilization of Sb 2 S 3 in Ar-O 2 mixed gas flow were investigated by the difference weight method. The effects of temperature and partial pressure of oxygen on the volatilization rate were investigated. A kinetic model based on chemical reaction was proposed. The expression of volatilization rate was derived and the apparent activation energy of the reaction was calculated.