【摘 要】
：
Due to the extensive prospect in research and application,as well as the significant value in military and peoples live,micro-machined accelerometer isbecom
【机 构】
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Harbin institute of technology
【出 处】
：
The 4th Advances in Optoelectronics and Micro/nano-optics (A
论文部分内容阅读
Due to the extensive prospect in research and application,as well as the significant value in military and peoples live,micro-machined accelerometer isbecoming the focus of micro sensors.Among the diverse accelerometer,with the high resolution,low consumption,simple structure,low noise,and highcompatibility with standard CMOS process,Sigma-Delta capacitive micro-machined accelerometer is currently widely used in discrete-time system.
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吴金有1944年5月出生于江苏南京。1988年7月毕业于中国书画函授大学国画系,2006年8月在中国美术家协会培训中心山水画高研班进修结业,2007-2009
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