Titanium is a potential material for micro-electro-mechanical systems (MEMS) for its good physical and mechanical property.In above application,lubrication is necessary to reduce adhension,friction and wear,which ensures the reliability and durability of devices.In this work,the self-assembled monolayers (SAMs) of y-aminopropyltrimethoxysilane (APS) and octadecyltrichlorosilane (OTS) were prepared on the substrate coated with titanium metal film by method of a molecular self-assembly process,radiated and solidified by ultraviolet radiation/ozone photochemical process.