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本文对半导体氧化物气体敏感材料的电导振荡特性加以研究分析,通过试验与理论分析得出气敏电导振荡的必要条件,并对电导振荡型气体敏感元件的原理、工艺技术和结构等进行分析说明.同时,对半导体氧化物气体敏感材料的常温气体敏感特性进行归纳总结,指出其优缺点和需要解决的问题.
In this paper, the conductivity oscillation characteristics of the semiconductor oxide gas sensitive materials are studied and analyzed. The necessary conditions for the gas-induced conductance oscillation are obtained through experimental and theoretical analysis. The principle, technology and structure of the conductivity-type gas sensor are analyzed and explained. At the same time, the sensitive properties of the gas at ambient temperature of the semiconductor oxide gas are summed up, pointing out the advantages and disadvantages and the problems to be solved.