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本文介绍一个集成电路工艺优化设计系统GOALSERVER。该系统是多目标优化数学方法与解析式工艺/器件一体化模拟的结合,它可根据对各器件特性的具体要求迅速、自动地选择工艺制造控制参数,使得各项器件特性同时达到最优。设计了一种工艺优化设计描述语言,使得系统具有良好的用户界面。新的多目标优化算法使得变量初值易于选择且易于获得满意的最优解。最后给出一个工艺优化设计的实例。
This article describes an integrated circuit technology optimization design system GOALSERVER. The system is a combination of multi-objective optimization mathematical method and analytical process / device integration simulation. It can quickly and automatically select the manufacturing process control parameters according to the specific requirements of each device characteristics, so that the characteristics of various devices can be optimized at the same time. Design a process optimization design description language, making the system has a good user interface. The new multi-objective optimization algorithm makes the initial value of variables easy to choose and easy to get satisfactory optimal solution. Finally, give an example of process optimization design.