Electronic transport behavior in inductively coupled hydrogen discharge

来源 :13th Asia-Pacific Conference on Plasma Science and Technolog | 被引量 : 0次 | 上传用户:mem12345
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  Inductively coupled hydrogen plasmas are widely utilized in a broad range of technology areas including fusion,negative ion sources,positive ion sources,neutral beam injectors (NBI),plasma etching,and other material processing.In particular,the negative hydrogen ions which generated by the inductively coupled discharge are important to produce high energetic neutral beams that heat the plasma and drive plasma currents for future fusion experiments in the ITER (International Thermonuclear Experimental Reactor).Therefore,it is strong interest in inductively coupled hydrogen plasmas.
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