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Effects of sputtering power and annealing temperature on surface roughness of gold films for high-re
[期刊论文] 作者:Jia-Qi Chen,Qiu-Shi Huang,Run-,
来源:核技术:英文版 年份:2019
Gold films deposited by direct current magnetron sputtering are used for synchrotron radiation optics. In this study, the microstructure and surface roughness o...
,Effects of sputtering power and annealing temperature on surface roughness of gold films for high-r
[期刊论文] 作者:Jia-Qi Chen,Qiu-Shi Huang,Run-Ze Qi,Yu-Fei Feng,Jiang-Tao Feng,Zhong Zhang,Wen-Bin Li,Zhan-Shan Wang,
来源:核技术(英文版) 年份:2019
Gold films deposited by direct current mag-netron sputtering are used for synchrotron radiation optics. In this study, the microstructure and surface roughness...
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